Cleanrooms (part 2)



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Aspects of clean-rooms that determine their application-specific requirements:

  • cleanliness class

  • fabrication type

  • ESD (electrostatic discharge) control

  • pass throughs

  • gowning area

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Cleanliness class is a standard determined by the contamination-control working group. This group currently uses a government specification known as Federal Standard 209D (US FED STD 209E was canceled November 29, 2001) to provide a qualified and standardized method for measuring how clean the air is in a cleanroom. Six classes have been established to designate cleanroom cleanliness. The class number denotes the maximum number of particles larger than one-half a micron that would be permitted in one cubic foot of cleanroom air. Here are the six classes:

  • Class 1 (ISO 3)
  • Class 10 (ISO4)
  • Class 100 (ISO 5)
  • Class 1,000 (ISO 6)
  • Class 10,000 (ISO 7)
  • Class 100,000 (ISO 8)
ISO 14644-1 cleanroom standards
particle/m³
Class 0.1 µm 0.2 µm 0.3 µm 0.5 µm 1 µm 5 µm
ISO 1 10 2        
ISO 2 100 24 10 4    
ISO 3 1,000 237 102 35 8  
ISO 4 10,000 2,370 1,020 352 83  
ISO 5 100,000 23,700 10,200 3,520 832 29
ISO 6 1,000,000 237,000 102,000 35,200 8,320 293
ISO 7       352,000 83,200 2,930
ISO 8       3,520,000 832,000 29,300
ISO 9       35,200,000 8,320,000 293,000

NEXT: More Cleanroom Standards

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Updated: Tuesday, 2008-08-19 17:55 PST